In a capacitive pressure sensor, what role does the silicon diaphragm play?

Question

In a capacitive pressure sensor, what role does the silicon diaphragm play?

Accepted Answer

The diaphragm’s deflection modulates the capacitance between it and a fixed reference plate

Answer

The diaphragm generates a piezoelectric charge in response to pressure

Answer

The diaphragm’s motion induces a magnetic field change

Answer

The stress on the diaphragm changes its electrical resistance

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